Wedge indentation studies of low-k films at inert, water and ambient environments

Wedge indentation studies of low-k films at inert, water and ambient environments

10.1016/j.msea.2009.04.030

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Bibliographic Details
Main Authors: Yeap, K.B., Zeng, K., Chi, D.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Low-k films
Time-dependent deformation
Wedge indentation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85838
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Institution: National University of Singapore
Description
Summary:10.1016/j.msea.2009.04.030

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