Wedge indentation studies of low-k films at inert, water and ambient environments

10.1016/j.msea.2009.04.030

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Bibliographic Details
Main Authors:	Yeap, K.B., Zeng, K., Chi, D.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Low-k films Time-dependent deformation Wedge indentation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85838
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-85838
record_format	dspace
spelling	sg-nus-scholar.10635-858382023-10-27T08:21:21Z Wedge indentation studies of low-k films at inert, water and ambient environments Yeap, K.B. Zeng, K. Chi, D. MECHANICAL ENGINEERING Low-k films Time-dependent deformation Wedge indentation 10.1016/j.msea.2009.04.030 Materials Science and Engineering A 518 1-2 132-138 2014-10-07T09:12:48Z 2014-10-07T09:12:48Z 2009-08-25 Article Yeap, K.B., Zeng, K., Chi, D. (2009-08-25). Wedge indentation studies of low-k films at inert, water and ambient environments. Materials Science and Engineering A 518 (1-2) : 132-138. ScholarBank@NUS Repository. https://doi.org/10.1016/j.msea.2009.04.030 09215093 http://scholarbank.nus.edu.sg/handle/10635/85838 000268532300020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Low-k films Time-dependent deformation Wedge indentation
spellingShingle	Low-k films Time-dependent deformation Wedge indentation Yeap, K.B. Zeng, K. Chi, D. Wedge indentation studies of low-k films at inert, water and ambient environments
description	10.1016/j.msea.2009.04.030
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Yeap, K.B. Zeng, K. Chi, D.
format	Article
author	Yeap, K.B. Zeng, K. Chi, D.
author_sort	Yeap, K.B.
title	Wedge indentation studies of low-k films at inert, water and ambient environments
title_short	Wedge indentation studies of low-k films at inert, water and ambient environments
title_full	Wedge indentation studies of low-k films at inert, water and ambient environments
title_fullStr	Wedge indentation studies of low-k films at inert, water and ambient environments
title_full_unstemmed	Wedge indentation studies of low-k films at inert, water and ambient environments
title_sort	wedge indentation studies of low-k films at inert, water and ambient environments
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85838
_version_	1781784773504532480

Wedge indentation studies of low-k films at inert, water and ambient environments

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