Development of 1×4 micro optical switch based on SOI vertical micromirror technology

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors:	Wang, Z.F., Shan, X.C., Wang, Z.P., Cao, W.Q., Xu, J.F., Lim, S.P., Noell, W., De Rooij, N.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Deep reactive ion etching (DRIE) Fiber optical switch Micro-optical-electro-mechanic system (MOEMS) Silicon-on-insulator (SOI)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85917
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-85917
record_format	dspace
spelling	sg-nus-scholar.10635-859172015-01-17T04:41:10Z Development of 1×4 micro optical switch based on SOI vertical micromirror technology Wang, Z.F. Shan, X.C. Wang, Z.P. Cao, W.Q. Xu, J.F. Lim, S.P. Noell, W. De Rooij, N. MECHANICAL ENGINEERING Deep reactive ion etching (DRIE) Fiber optical switch Micro-optical-electro-mechanic system (MOEMS) Silicon-on-insulator (SOI) Proceedings of SPIE - The International Society for Optical Engineering 4983 109-113 PSISD 2014-10-07T09:13:42Z 2014-10-07T09:13:42Z 2003 Conference Paper Wang, Z.F.,Shan, X.C.,Wang, Z.P.,Cao, W.Q.,Xu, J.F.,Lim, S.P.,Noell, W.,De Rooij, N. (2003). Development of 1×4 micro optical switch based on SOI vertical micromirror technology. Proceedings of SPIE - The International Society for Optical Engineering 4983 : 109-113. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/85917 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Deep reactive ion etching (DRIE) Fiber optical switch Micro-optical-electro-mechanic system (MOEMS) Silicon-on-insulator (SOI)
spellingShingle	Deep reactive ion etching (DRIE) Fiber optical switch Micro-optical-electro-mechanic system (MOEMS) Silicon-on-insulator (SOI) Wang, Z.F. Shan, X.C. Wang, Z.P. Cao, W.Q. Xu, J.F. Lim, S.P. Noell, W. De Rooij, N. Development of 1×4 micro optical switch based on SOI vertical micromirror technology
description	Proceedings of SPIE - The International Society for Optical Engineering
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Wang, Z.F. Shan, X.C. Wang, Z.P. Cao, W.Q. Xu, J.F. Lim, S.P. Noell, W. De Rooij, N.
format	Conference or Workshop Item
author	Wang, Z.F. Shan, X.C. Wang, Z.P. Cao, W.Q. Xu, J.F. Lim, S.P. Noell, W. De Rooij, N.
author_sort	Wang, Z.F.
title	Development of 1×4 micro optical switch based on SOI vertical micromirror technology
title_short	Development of 1×4 micro optical switch based on SOI vertical micromirror technology
title_full	Development of 1×4 micro optical switch based on SOI vertical micromirror technology
title_fullStr	Development of 1×4 micro optical switch based on SOI vertical micromirror technology
title_full_unstemmed	Development of 1×4 micro optical switch based on SOI vertical micromirror technology
title_sort	development of 1×4 micro optical switch based on soi vertical micromirror technology
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85917
_version_	1681089888369246208

Development of 1×4 micro optical switch based on SOI vertical micromirror technology

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