Development of 1×4 micro optical switch based on SOI vertical micromirror technology

• Main Authors: Wang, Z.F., Shan, X.C., Wang, Z.P., Cao, W.Q., Xu, J.F., Lim, S.P., Noell, W., De Rooij, N.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Deep reactive ion etching (DRIE); Fiber optical switch; Micro-optical-electro-mechanic system (MOEMS); Silicon-on-insulator (SOI)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/85917
• Institution: National University of Singapore

Proceedings of SPIE - The International Society for Optical Engineering