Low stress silicon nitride layers for MEMS applications

10.1117/12.696350

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Bibliographic Details
Main Authors:	Iliescu, C., Wei, J., Chen, B., Ong, P.L., Tay, F.E.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	High frequency High power Low stress PECVD Silicon nitride
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/86007
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-86007
record_format	dspace
spelling	sg-nus-scholar.10635-860072023-10-26T22:02:14Z Low stress silicon nitride layers for MEMS applications Iliescu, C. Wei, J. Chen, B. Ong, P.L. Tay, F.E.H. MECHANICAL ENGINEERING High frequency High power Low stress PECVD Silicon nitride 10.1117/12.696350 Proceedings of SPIE - The International Society for Optical Engineering 6415 - PSISD 2014-10-07T09:14:46Z 2014-10-07T09:14:46Z 2007 Conference Paper Iliescu, C., Wei, J., Chen, B., Ong, P.L., Tay, F.E.H. (2007). Low stress silicon nitride layers for MEMS applications. Proceedings of SPIE - The International Society for Optical Engineering 6415 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.696350 0819465232 0277786X http://scholarbank.nus.edu.sg/handle/10635/86007 000245723600017 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	High frequency High power Low stress PECVD Silicon nitride
spellingShingle	High frequency High power Low stress PECVD Silicon nitride Iliescu, C. Wei, J. Chen, B. Ong, P.L. Tay, F.E.H. Low stress silicon nitride layers for MEMS applications
description	10.1117/12.696350
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Iliescu, C. Wei, J. Chen, B. Ong, P.L. Tay, F.E.H.
format	Conference or Workshop Item
author	Iliescu, C. Wei, J. Chen, B. Ong, P.L. Tay, F.E.H.
author_sort	Iliescu, C.
title	Low stress silicon nitride layers for MEMS applications
title_short	Low stress silicon nitride layers for MEMS applications
title_full	Low stress silicon nitride layers for MEMS applications
title_fullStr	Low stress silicon nitride layers for MEMS applications
title_full_unstemmed	Low stress silicon nitride layers for MEMS applications
title_sort	low stress silicon nitride layers for mems applications
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/86007
_version_	1781784793752535040

Low stress silicon nitride layers for MEMS applications

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