Polarization impact on partially coherent imaging

Polarization impact on partially coherent imaging

10.1117/12.600415

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Bibliographic Details
Main Authors: Chua, G.S., Tay, C.J., Quan, C., Lin, Q.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Immersion lithography
Partially coherent imagery
Polarization
TE-polarized dipole
Transmission cross coefficient
Online Access:http://scholarbank.nus.edu.sg/handle/10635/86057
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/86057

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