Polarization impact on partially coherent imaging

10.1117/12.600415

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Bibliographic Details
Main Authors:	Chua, G.S., Tay, C.J., Quan, C., Lin, Q.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Immersion lithography Partially coherent imagery Polarization TE-polarized dipole Transmission cross coefficient
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/86057
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-86057
record_format	dspace
spelling	sg-nus-scholar.10635-860572024-11-13T04:24:10Z Polarization impact on partially coherent imaging Chua, G.S. Tay, C.J. Quan, C. Lin, Q. MECHANICAL ENGINEERING Immersion lithography Partially coherent imagery Polarization TE-polarized dipole Transmission cross coefficient 10.1117/12.600415 Proceedings of SPIE - The International Society for Optical Engineering 5754 PART 2 1090-1101 PSISD 2014-10-07T09:15:22Z 2014-10-07T09:15:22Z 2005 Conference Paper Chua, G.S., Tay, C.J., Quan, C., Lin, Q. (2005). Polarization impact on partially coherent imaging. Proceedings of SPIE - The International Society for Optical Engineering 5754 (PART 2) : 1090-1101. ScholarBank@NUS Repository. https://doi.org/10.1117/12.600415 0277786X http://scholarbank.nus.edu.sg/handle/10635/86057 000229586600109 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Immersion lithography Partially coherent imagery Polarization TE-polarized dipole Transmission cross coefficient
spellingShingle	Immersion lithography Partially coherent imagery Polarization TE-polarized dipole Transmission cross coefficient Chua, G.S. Tay, C.J. Quan, C. Lin, Q. Polarization impact on partially coherent imaging
description	10.1117/12.600415
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Chua, G.S. Tay, C.J. Quan, C. Lin, Q.
format	Conference or Workshop Item
author	Chua, G.S. Tay, C.J. Quan, C. Lin, Q.
author_sort	Chua, G.S.
title	Polarization impact on partially coherent imaging
title_short	Polarization impact on partially coherent imaging
title_full	Polarization impact on partially coherent imaging
title_fullStr	Polarization impact on partially coherent imaging
title_full_unstemmed	Polarization impact on partially coherent imaging
title_sort	polarization impact on partially coherent imaging
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/86057
_version_	1821198848192675840

Polarization impact on partially coherent imaging

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