Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy

• Main Authors: Chua, D.H.C., Hsieh, J., Gao, X., Qi, D., Chen, S., Varghese, B., Sow, C.H., Wee, A.T.S., Lu, J., Loh, K.P., Yu, X., Moser, H.O.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/86276
• Institution: National University of Singapore

10.1063/1.3156689