Effects and thermal stability of hydrogen microwave plasma treatment on tetrahedral amorphous carbon films by in situ ultraviolet photoelectron spectroscopy
10.1063/1.3156689
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Main Authors: | Chua, D.H.C., Hsieh, J., Gao, X., Qi, D., Chen, S., Varghese, B., Sow, C.H., Wee, A.T.S., Lu, J., Loh, K.P., Yu, X., Moser, H.O. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/86276 |
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Institution: | National University of Singapore |
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