Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition
10.1116/1.2191860
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sg-nus-scholar.10635-865262024-11-12T22:17:57Z Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition Chen, W. Gong, H. Zeng, K. MECHANICAL ENGINEERING MATERIALS SCIENCE AND ENGINEERING 10.1116/1.2191860 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 24 3 537-541 JVTAD 2014-10-07T09:51:45Z 2014-10-07T09:51:45Z 2006 Article Chen, W., Gong, H., Zeng, K. (2006). Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 24 (3) : 537-541. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2191860 07342101 http://scholarbank.nus.edu.sg/handle/10635/86526 000238091300022 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1116/1.2191860 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Chen, W. Gong, H. Zeng, K. |
| format |
Article |
| author |
Chen, W. Gong, H. Zeng, K. |
| spellingShingle |
Chen, W. Gong, H. Zeng, K. Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| author_sort |
Chen, W. |
| title |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_short |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_full |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_fullStr |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_full_unstemmed |
Mechanical properties of Cu-Al-O thin films prepared by plasma-enhanced chemical vapor deposition |
| title_sort |
mechanical properties of cu-al-o thin films prepared by plasma-enhanced chemical vapor deposition |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/86526 |
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1821198372785094656 |