Mechanical properties of gradient pulse biased amorphous carbon film

Mechanical properties of gradient pulse biased amorphous carbon film

10.1016/j.tsf.2007.07.046

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Bibliographic Details
Main Authors: Teo, E.H.T., Chua, D.H.C., Lee, M.L., Ee, C.L., Lee, C.K., Tay, B.K.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Article
Published: 2014
Subjects:
Amorphous carbon
Hardness
Stress
Online Access:http://scholarbank.nus.edu.sg/handle/10635/86527
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Institution: National University of Singapore
Description
Summary:10.1016/j.tsf.2007.07.046

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