Mechanical properties of gradient pulse biased amorphous carbon film

10.1016/j.tsf.2007.07.046

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Bibliographic Details
Main Authors:	Teo, E.H.T., Chua, D.H.C., Lee, M.L., Ee, C.L., Lee, C.K., Tay, B.K.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Article
Published:	2014
Subjects:	Amorphous carbon Hardness Stress
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/86527
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-86527
record_format	dspace
spelling	sg-nus-scholar.10635-865272023-10-26T09:05:03Z Mechanical properties of gradient pulse biased amorphous carbon film Teo, E.H.T. Chua, D.H.C. Lee, M.L. Ee, C.L. Lee, C.K. Tay, B.K. MATERIALS SCIENCE AND ENGINEERING Amorphous carbon Hardness Stress 10.1016/j.tsf.2007.07.046 Thin Solid Films 516 16 5364-5367 THSFA 2014-10-07T09:51:46Z 2014-10-07T09:51:46Z 2008-06-30 Article Teo, E.H.T., Chua, D.H.C., Lee, M.L., Ee, C.L., Lee, C.K., Tay, B.K. (2008-06-30). Mechanical properties of gradient pulse biased amorphous carbon film. Thin Solid Films 516 (16) : 5364-5367. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2007.07.046 00406090 http://scholarbank.nus.edu.sg/handle/10635/86527 000257452200045 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Amorphous carbon Hardness Stress
spellingShingle	Amorphous carbon Hardness Stress Teo, E.H.T. Chua, D.H.C. Lee, M.L. Ee, C.L. Lee, C.K. Tay, B.K. Mechanical properties of gradient pulse biased amorphous carbon film
description	10.1016/j.tsf.2007.07.046
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Teo, E.H.T. Chua, D.H.C. Lee, M.L. Ee, C.L. Lee, C.K. Tay, B.K.
format	Article
author	Teo, E.H.T. Chua, D.H.C. Lee, M.L. Ee, C.L. Lee, C.K. Tay, B.K.
author_sort	Teo, E.H.T.
title	Mechanical properties of gradient pulse biased amorphous carbon film
title_short	Mechanical properties of gradient pulse biased amorphous carbon film
title_full	Mechanical properties of gradient pulse biased amorphous carbon film
title_fullStr	Mechanical properties of gradient pulse biased amorphous carbon film
title_full_unstemmed	Mechanical properties of gradient pulse biased amorphous carbon film
title_sort	mechanical properties of gradient pulse biased amorphous carbon film
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/86527
_version_	1781784895177097216

Mechanical properties of gradient pulse biased amorphous carbon film

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