Angled XPS analysis of low-k dielectric surfaces after cleaning

Diffusion and Defect Data Pt.B: Solid State Phenomena

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Bibliographic Details
Main Authors:	Tan, Y.S., Chooi, S.Y.M., Sin, C.-Y., Ee, P.-Y., Srinivasan, M.P., Pehkonen, S.O.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Cleaning Contamination Low-k dielectric X-ray photoelectron spectroscopy
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/90518
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-90518
record_format	dspace
spelling	sg-nus-scholar.10635-905182015-01-07T12:55:12Z Angled XPS analysis of low-k dielectric surfaces after cleaning Tan, Y.S. Chooi, S.Y.M. Sin, C.-Y. Ee, P.-Y. Srinivasan, M.P. Pehkonen, S.O. CHEMICAL & BIOMOLECULAR ENGINEERING Cleaning Contamination Low-k dielectric X-ray photoelectron spectroscopy Diffusion and Defect Data Pt.B: Solid State Phenomena 103-104 331-336 DDBPE 2014-10-09T07:06:11Z 2014-10-09T07:06:11Z 2005 Conference Paper Tan, Y.S.,Chooi, S.Y.M.,Sin, C.-Y.,Ee, P.-Y.,Srinivasan, M.P.,Pehkonen, S.O. (2005). Angled XPS analysis of low-k dielectric surfaces after cleaning. Diffusion and Defect Data Pt.B: Solid State Phenomena 103-104 : 331-336. ScholarBank@NUS Repository. 390845106X 10120394 http://scholarbank.nus.edu.sg/handle/10635/90518 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Cleaning Contamination Low-k dielectric X-ray photoelectron spectroscopy
spellingShingle	Cleaning Contamination Low-k dielectric X-ray photoelectron spectroscopy Tan, Y.S. Chooi, S.Y.M. Sin, C.-Y. Ee, P.-Y. Srinivasan, M.P. Pehkonen, S.O. Angled XPS analysis of low-k dielectric surfaces after cleaning
description	Diffusion and Defect Data Pt.B: Solid State Phenomena
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Tan, Y.S. Chooi, S.Y.M. Sin, C.-Y. Ee, P.-Y. Srinivasan, M.P. Pehkonen, S.O.
format	Conference or Workshop Item
author	Tan, Y.S. Chooi, S.Y.M. Sin, C.-Y. Ee, P.-Y. Srinivasan, M.P. Pehkonen, S.O.
author_sort	Tan, Y.S.
title	Angled XPS analysis of low-k dielectric surfaces after cleaning
title_short	Angled XPS analysis of low-k dielectric surfaces after cleaning
title_full	Angled XPS analysis of low-k dielectric surfaces after cleaning
title_fullStr	Angled XPS analysis of low-k dielectric surfaces after cleaning
title_full_unstemmed	Angled XPS analysis of low-k dielectric surfaces after cleaning
title_sort	angled xps analysis of low-k dielectric surfaces after cleaning
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/90518
_version_	1681090613526659072

Angled XPS analysis of low-k dielectric surfaces after cleaning

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