Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication

10.1117/12.280541

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Bibliographic Details
Main Authors:	Ko, T.-M., Fan, M.-H., Cheng, A., Yu, R.
Other Authors:	CHEMICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Computer simulation Masking linearity Notching Off-axis mumination Optical proximity effect Organic barc Photoresist Polycide Reflectivity
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/91812
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-91812
record_format	dspace
spelling	sg-nus-scholar.10635-918122023-10-29T21:06:37Z Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication Ko, T.-M. Fan, M.-H. Cheng, A. Yu, R. CHEMICAL ENGINEERING Computer simulation Masking linearity Notching Off-axis mumination Optical proximity effect Organic barc Photoresist Polycide Reflectivity 10.1117/12.280541 Proceedings of SPIE - The International Society for Optical Engineering 3183 207-217 PSISD 2014-10-09T08:22:35Z 2014-10-09T08:22:35Z 1997 Conference Paper Ko, T.-M., Fan, M.-H., Cheng, A., Yu, R. (1997). Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 207-217. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280541 0277786X http://scholarbank.nus.edu.sg/handle/10635/91812 A1997BJ57L00022 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Computer simulation Masking linearity Notching Off-axis mumination Optical proximity effect Organic barc Photoresist Polycide Reflectivity
spellingShingle	Computer simulation Masking linearity Notching Off-axis mumination Optical proximity effect Organic barc Photoresist Polycide Reflectivity Ko, T.-M. Fan, M.-H. Cheng, A. Yu, R. Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
description	10.1117/12.280541
author2	CHEMICAL ENGINEERING
author_facet	CHEMICAL ENGINEERING Ko, T.-M. Fan, M.-H. Cheng, A. Yu, R.
format	Conference or Workshop Item
author	Ko, T.-M. Fan, M.-H. Cheng, A. Yu, R.
author_sort	Ko, T.-M.
title	Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_short	Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_full	Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_fullStr	Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_full_unstemmed	Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_sort	implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/91812
_version_	1781785695903285248

Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication

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