Deposition of osmium and ruthenium thin films from organometallic cluster precursors

Deposition of osmium and ruthenium thin films from organometallic cluster precursors

10.1002/aoc.1494

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Bibliographic Details
Main Authors: Li, C., Leong, W.K., Loh, K.P.
Other Authors: CHEMISTRY
Format: Article
Published: 2014
Subjects:
Alloy
Cluster
CVD
Osmium
Ruthenium
Online Access:http://scholarbank.nus.edu.sg/handle/10635/93531
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Institution: National University of Singapore
id sg-nus-scholar.10635-93531
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spelling sg-nus-scholar.10635-935312024-11-12T21:09:21Z Deposition of osmium and ruthenium thin films from organometallic cluster precursors Li, C. Leong, W.K. Loh, K.P. CHEMISTRY Alloy Cluster CVD Osmium Ruthenium 10.1002/aoc.1494 Applied Organometallic Chemistry 23 5 196-199 AOCHE 2014-10-16T08:25:23Z 2014-10-16T08:25:23Z 2009-05 Article Li, C., Leong, W.K., Loh, K.P. (2009-05). Deposition of osmium and ruthenium thin films from organometallic cluster precursors. Applied Organometallic Chemistry 23 (5) : 196-199. ScholarBank@NUS Repository. https://doi.org/10.1002/aoc.1494 02682605 http://scholarbank.nus.edu.sg/handle/10635/93531 000265556400005 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Alloy
Cluster
CVD
Osmium
Ruthenium
spellingShingle Alloy
Cluster
CVD
Osmium
Ruthenium
Li, C.
Leong, W.K.
Loh, K.P.
Deposition of osmium and ruthenium thin films from organometallic cluster precursors
description 10.1002/aoc.1494
author2 CHEMISTRY
author_facet CHEMISTRY
Li, C.
Leong, W.K.
Loh, K.P.
format Article
author Li, C.
Leong, W.K.
Loh, K.P.
author_sort Li, C.
title Deposition of osmium and ruthenium thin films from organometallic cluster precursors
title_short Deposition of osmium and ruthenium thin films from organometallic cluster precursors
title_full Deposition of osmium and ruthenium thin films from organometallic cluster precursors
title_fullStr Deposition of osmium and ruthenium thin films from organometallic cluster precursors
title_full_unstemmed Deposition of osmium and ruthenium thin films from organometallic cluster precursors
title_sort deposition of osmium and ruthenium thin films from organometallic cluster precursors
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/93531
_version_ 1821188847863595008

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