A high resolution beam scanning system for deep ion beam lithography
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/95631 |
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| Institution: | National University of Singapore |
| Summary: | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
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