A high resolution beam scanning system for deep ion beam lithography
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
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2014
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sg-nus-scholar.10635-956312015-01-17T07:58:57Z A high resolution beam scanning system for deep ion beam lithography Sanchez, J.L. Van Kan, J.A. Osipowicz, T. Springham, S.V. Watt, F. PHYSICS Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 136-138 385-389 NIMBE 2014-10-16T09:13:58Z 2014-10-16T09:13:58Z 1998-03 Article Sanchez, J.L.,Van Kan, J.A.,Osipowicz, T.,Springham, S.V.,Watt, F. (1998-03). A high resolution beam scanning system for deep ion beam lithography. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 136-138 : 385-389. ScholarBank@NUS Repository. 0168583X http://scholarbank.nus.edu.sg/handle/10635/95631 NOT_IN_WOS Scopus |
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National University of Singapore |
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Singapore |
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| description |
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
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PHYSICS |
| author_facet |
PHYSICS Sanchez, J.L. Van Kan, J.A. Osipowicz, T. Springham, S.V. Watt, F. |
| format |
Article |
| author |
Sanchez, J.L. Van Kan, J.A. Osipowicz, T. Springham, S.V. Watt, F. |
| spellingShingle |
Sanchez, J.L. Van Kan, J.A. Osipowicz, T. Springham, S.V. Watt, F. A high resolution beam scanning system for deep ion beam lithography |
| author_sort |
Sanchez, J.L. |
| title |
A high resolution beam scanning system for deep ion beam lithography |
| title_short |
A high resolution beam scanning system for deep ion beam lithography |
| title_full |
A high resolution beam scanning system for deep ion beam lithography |
| title_fullStr |
A high resolution beam scanning system for deep ion beam lithography |
| title_full_unstemmed |
A high resolution beam scanning system for deep ion beam lithography |
| title_sort |
high resolution beam scanning system for deep ion beam lithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/95631 |
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1681091513273024512 |