An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry
10.1007/BF00355966
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sg-nus-scholar.10635-957642023-10-30T07:25:58Z An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry Wee, A.T.S. Huan, C.H.A. Tan, K.L. Tan, R.S.K. PHYSICS 10.1007/BF00355966 Journal of Materials Science 29 15 4037-4042 JMTSA 2014-10-16T09:15:33Z 2014-10-16T09:15:33Z 1994-01 Article Wee, A.T.S., Huan, C.H.A., Tan, K.L., Tan, R.S.K. (1994-01). An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry. Journal of Materials Science 29 (15) : 4037-4042. ScholarBank@NUS Repository. https://doi.org/10.1007/BF00355966 00222461 http://scholarbank.nus.edu.sg/handle/10635/95764 A1994PB78200021 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1007/BF00355966 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Wee, A.T.S. Huan, C.H.A. Tan, K.L. Tan, R.S.K. |
| format |
Article |
| author |
Wee, A.T.S. Huan, C.H.A. Tan, K.L. Tan, R.S.K. |
| spellingShingle |
Wee, A.T.S. Huan, C.H.A. Tan, K.L. Tan, R.S.K. An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry |
| author_sort |
Wee, A.T.S. |
| title |
An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry |
| title_short |
An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry |
| title_full |
An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry |
| title_fullStr |
An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry |
| title_full_unstemmed |
An investigation of the Ar+ ion-enhanced reaction of CCl4 on Si(100) by secondary ion mass spectrometry |
| title_sort |
investigation of the ar+ ion-enhanced reaction of ccl4 on si(100) by secondary ion mass spectrometry |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/95764 |
| _version_ |
1781786326048178176 |