Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

Journal of Materials Research

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Bibliographic Details
Main Authors: Taijing, L., Ng, S.C., Furukawa, J., Furuya, H.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/95968
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/95968

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