Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

Journal of Materials Research

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Main Authors:	Taijing, L., Ng, S.C., Furukawa, J., Furuya, H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/95968
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-95968
record_format	dspace
spelling	sg-nus-scholar.10635-959682024-11-10T23:03:36Z Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer Taijing, L. Ng, S.C. Furukawa, J. Furuya, H. PHYSICS MATERIALS SCIENCE Journal of Materials Research 11 4 878-883 JMREE 2014-10-16T09:17:56Z 2014-10-16T09:17:56Z 1996-04 Article Taijing, L.,Ng, S.C.,Furukawa, J.,Furuya, H. (1996-04). Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer. Journal of Materials Research 11 (4) : 878-883. ScholarBank@NUS Repository. 08842914 http://scholarbank.nus.edu.sg/handle/10635/95968 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Journal of Materials Research
author2	PHYSICS
author_facet	PHYSICS Taijing, L. Ng, S.C. Furukawa, J. Furuya, H.
format	Article
author	Taijing, L. Ng, S.C. Furukawa, J. Furuya, H.
spellingShingle	Taijing, L. Ng, S.C. Furukawa, J. Furuya, H. Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
author_sort	Taijing, L.
title	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_short	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_full	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_fullStr	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_full_unstemmed	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_sort	characterization of surface microroughness of silicon wafers by a multipass fabry-perot rayleigh-brillouin scattering spectrometer
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/95968
_version_	1821185947427930112

Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

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