Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

Journal of Materials Research

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Bibliographic Details
Main Authors:	Taijing, L., Ng, S.C., Furukawa, J., Furuya, H.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/95968
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-95968
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spelling	sg-nus-scholar.10635-959682015-01-16T03:05:29Z Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer Taijing, L. Ng, S.C. Furukawa, J. Furuya, H. MATERIALS SCIENCE PHYSICS Journal of Materials Research 11 4 878-883 JMREE 2014-10-16T09:17:56Z 2014-10-16T09:17:56Z 1996-04 Article Taijing, L.,Ng, S.C.,Furukawa, J.,Furuya, H. (1996-04). Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer. Journal of Materials Research 11 (4) : 878-883. ScholarBank@NUS Repository. 08842914 http://scholarbank.nus.edu.sg/handle/10635/95968 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of Materials Research
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE Taijing, L. Ng, S.C. Furukawa, J. Furuya, H.
format	Article
author	Taijing, L. Ng, S.C. Furukawa, J. Furuya, H.
spellingShingle	Taijing, L. Ng, S.C. Furukawa, J. Furuya, H. Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
author_sort	Taijing, L.
title	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_short	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_full	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_fullStr	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_full_unstemmed	Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_sort	characterization of surface microroughness of silicon wafers by a multipass fabry-perot rayleigh-brillouin scattering spectrometer
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/95968
_version_	1681091574377742336

Characterization of surface microroughness of silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

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