Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy O2 + secondary-ion-mass spectrometry

Depth resolution studies in SiGe delta-doped multilayers using ultralow-energy O2 + secondary-ion-mass spectrometry

10.1116/1.2167986

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Bibliographic Details
Main Authors: Chanbasha, A.R., Wee, A.T.S.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96174
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Institution: National University of Singapore
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Summary:10.1116/1.2167986

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