Dopant activation in subamorphized silicon upon laser annealing

10.1063/1.2335950

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Bibliographic Details
Main Authors:	Ong, K.K., Pey, K.L., Lee, P.S., Wee, A.T.S., Wang, X.C., Chong, Y.F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96263
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96263
record_format	dspace
spelling	sg-nus-scholar.10635-962632023-10-29T21:07:14Z Dopant activation in subamorphized silicon upon laser annealing Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Wang, X.C. Chong, Y.F. PHYSICS 10.1063/1.2335950 Applied Physics Letters 89 8 - APPLA 2014-10-16T09:21:24Z 2014-10-16T09:21:24Z 2006 Article Ong, K.K., Pey, K.L., Lee, P.S., Wee, A.T.S., Wang, X.C., Chong, Y.F. (2006). Dopant activation in subamorphized silicon upon laser annealing. Applied Physics Letters 89 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2335950 00036951 http://scholarbank.nus.edu.sg/handle/10635/96263 000240035400048 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.2335950
author2	PHYSICS
author_facet	PHYSICS Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Wang, X.C. Chong, Y.F.
format	Article
author	Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Wang, X.C. Chong, Y.F.
spellingShingle	Ong, K.K. Pey, K.L. Lee, P.S. Wee, A.T.S. Wang, X.C. Chong, Y.F. Dopant activation in subamorphized silicon upon laser annealing
author_sort	Ong, K.K.
title	Dopant activation in subamorphized silicon upon laser annealing
title_short	Dopant activation in subamorphized silicon upon laser annealing
title_full	Dopant activation in subamorphized silicon upon laser annealing
title_fullStr	Dopant activation in subamorphized silicon upon laser annealing
title_full_unstemmed	Dopant activation in subamorphized silicon upon laser annealing
title_sort	dopant activation in subamorphized silicon upon laser annealing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96263
_version_	1781786419878952960

Dopant activation in subamorphized silicon upon laser annealing

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