Dopant activation in subamorphized silicon upon laser annealing
10.1063/1.2335950
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Main Authors: | Ong, K.K., Pey, K.L., Lee, P.S., Wee, A.T.S., Wang, X.C., Chong, Y.F. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/96263 |
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Institution: | National University of Singapore |
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