Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials

Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials

10.1166/jnn.2005.084

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Bibliographic Details
Main Authors: Xie, J.L., Lin, J.Y., Wang, Y.H., Narayanan, B., Wang, M.R., Kumar, R.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Carbon-Doped
Low-k Material
PECVD
Thermal Stability
TMCTS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96345
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-963452023-10-30T07:28:53Z Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials Xie, J.L. Lin, J.Y. Wang, Y.H. Narayanan, B. Wang, M.R. Kumar, R. PHYSICS Carbon-Doped Low-k Material PECVD Thermal Stability TMCTS 10.1166/jnn.2005.084 Journal of Nanoscience and Nanotechnology 5 4 550-557 2014-10-16T09:22:21Z 2014-10-16T09:22:21Z 2005 Article Xie, J.L., Lin, J.Y., Wang, Y.H., Narayanan, B., Wang, M.R., Kumar, R. (2005). Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials. Journal of Nanoscience and Nanotechnology 5 (4) : 550-557. ScholarBank@NUS Repository. https://doi.org/10.1166/jnn.2005.084 15334880 http://scholarbank.nus.edu.sg/handle/10635/96345 000229119800006 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Carbon-Doped
Low-k Material
PECVD
Thermal Stability
TMCTS
spellingShingle Carbon-Doped
Low-k Material
PECVD
Thermal Stability
TMCTS
Xie, J.L.
Lin, J.Y.
Wang, Y.H.
Narayanan, B.
Wang, M.R.
Kumar, R.
Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials
description 10.1166/jnn.2005.084
author2 PHYSICS
author_facet PHYSICS
Xie, J.L.
Lin, J.Y.
Wang, Y.H.
Narayanan, B.
Wang, M.R.
Kumar, R.
format Article
author Xie, J.L.
Lin, J.Y.
Wang, Y.H.
Narayanan, B.
Wang, M.R.
Kumar, R.
author_sort Xie, J.L.
title Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials
title_short Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials
title_full Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials
title_fullStr Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials
title_full_unstemmed Effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials
title_sort effect of thermal treatment on carbon-doped silicon oxide low dielectric constant materials
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96345
_version_ 1781786436356276224

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