High temperature annealing of hydrogenated amorphous silicon carbide thin films
10.1016/S0040-6090(00)01867-8
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sg-nus-scholar.10635-967962023-10-27T08:01:44Z High temperature annealing of hydrogenated amorphous silicon carbide thin films Wang, Y. Lin, J. Huan, C.H.A. Feng, Z.C. Chua, S.J. PHYSICS 10.1016/S0040-6090(00)01867-8 Thin Solid Films 384 2 173-176 THSFA 2014-10-16T09:27:37Z 2014-10-16T09:27:37Z 2001-03-15 Article Wang, Y., Lin, J., Huan, C.H.A., Feng, Z.C., Chua, S.J. (2001-03-15). High temperature annealing of hydrogenated amorphous silicon carbide thin films. Thin Solid Films 384 (2) : 173-176. ScholarBank@NUS Repository. https://doi.org/10.1016/S0040-6090(00)01867-8 00406090 http://scholarbank.nus.edu.sg/handle/10635/96796 000167437800004 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1016/S0040-6090(00)01867-8 |
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PHYSICS |
| author_facet |
PHYSICS Wang, Y. Lin, J. Huan, C.H.A. Feng, Z.C. Chua, S.J. |
| format |
Article |
| author |
Wang, Y. Lin, J. Huan, C.H.A. Feng, Z.C. Chua, S.J. |
| spellingShingle |
Wang, Y. Lin, J. Huan, C.H.A. Feng, Z.C. Chua, S.J. High temperature annealing of hydrogenated amorphous silicon carbide thin films |
| author_sort |
Wang, Y. |
| title |
High temperature annealing of hydrogenated amorphous silicon carbide thin films |
| title_short |
High temperature annealing of hydrogenated amorphous silicon carbide thin films |
| title_full |
High temperature annealing of hydrogenated amorphous silicon carbide thin films |
| title_fullStr |
High temperature annealing of hydrogenated amorphous silicon carbide thin films |
| title_full_unstemmed |
High temperature annealing of hydrogenated amorphous silicon carbide thin films |
| title_sort |
high temperature annealing of hydrogenated amorphous silicon carbide thin films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96796 |
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1781786541633306624 |