Mechanism of tantalum adhesion on SiLK™

10.1063/1.2051792

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Bibliographic Details
Main Authors:	Hu, Y., Yang, S.-W., Chen, X.T., Lu, D., Feng, Y.P., Wu, P.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97170
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Institution:	National University of Singapore

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Summary:	10.1063/1.2051792

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