Mechanism of tantalum adhesion on SiLK™

10.1063/1.2051792

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Main Authors: Hu, Y., Yang, S.-W., Chen, X.T., Lu, D., Feng, Y.P., Wu, P.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97170
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-971702023-10-25T23:01:59Z Mechanism of tantalum adhesion on SiLK™ Hu, Y. Yang, S.-W. Chen, X.T. Lu, D. Feng, Y.P. Wu, P. PHYSICS 10.1063/1.2051792 Applied Physics Letters 87 12 1-3 APPLA 2014-10-16T09:32:06Z 2014-10-16T09:32:06Z 2005-09-19 Article Hu, Y., Yang, S.-W., Chen, X.T., Lu, D., Feng, Y.P., Wu, P. (2005-09-19). Mechanism of tantalum adhesion on SiLK™. Applied Physics Letters 87 (12) : 1-3. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2051792 00036951 http://scholarbank.nus.edu.sg/handle/10635/97170 000231907200060 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.2051792
author2 PHYSICS
author_facet PHYSICS
Hu, Y.
Yang, S.-W.
Chen, X.T.
Lu, D.
Feng, Y.P.
Wu, P.
format Article
author Hu, Y.
Yang, S.-W.
Chen, X.T.
Lu, D.
Feng, Y.P.
Wu, P.
spellingShingle Hu, Y.
Yang, S.-W.
Chen, X.T.
Lu, D.
Feng, Y.P.
Wu, P.
Mechanism of tantalum adhesion on SiLK™
author_sort Hu, Y.
title Mechanism of tantalum adhesion on SiLK™
title_short Mechanism of tantalum adhesion on SiLK™
title_full Mechanism of tantalum adhesion on SiLK™
title_fullStr Mechanism of tantalum adhesion on SiLK™
title_full_unstemmed Mechanism of tantalum adhesion on SiLK™
title_sort mechanism of tantalum adhesion on silk™
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/97170
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