Mechanism of tantalum adhesion on SiLK™
10.1063/1.2051792
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Main Authors: | Hu, Y., Yang, S.-W., Chen, X.T., Lu, D., Feng, Y.P., Wu, P. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/97170 |
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Institution: | National University of Singapore |
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