Micromachining using deep ion beam lithography
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
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2014
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sg-nus-scholar.10635-971952015-01-16T22:07:54Z Micromachining using deep ion beam lithography Springham, S.V. Osipowicz, T. Sanchez, J.L. Gan, L.H. Watt, F. PHYSICS Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 130 1-4 155-159 NIMBE 2014-10-16T09:32:24Z 2014-10-16T09:32:24Z 1997-07 Article Springham, S.V.,Osipowicz, T.,Sanchez, J.L.,Gan, L.H.,Watt, F. (1997-07). Micromachining using deep ion beam lithography. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 130 (1-4) : 155-159. ScholarBank@NUS Repository. 0168583X http://scholarbank.nus.edu.sg/handle/10635/97195 NOT_IN_WOS Scopus |
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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
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PHYSICS |
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PHYSICS Springham, S.V. Osipowicz, T. Sanchez, J.L. Gan, L.H. Watt, F. |
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Article |
| author |
Springham, S.V. Osipowicz, T. Sanchez, J.L. Gan, L.H. Watt, F. |
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Springham, S.V. Osipowicz, T. Sanchez, J.L. Gan, L.H. Watt, F. Micromachining using deep ion beam lithography |
| author_sort |
Springham, S.V. |
| title |
Micromachining using deep ion beam lithography |
| title_short |
Micromachining using deep ion beam lithography |
| title_full |
Micromachining using deep ion beam lithography |
| title_fullStr |
Micromachining using deep ion beam lithography |
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Micromachining using deep ion beam lithography |
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micromachining using deep ion beam lithography |
| publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/97195 |
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