On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence
10.1149/1.3481769
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2014
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sg-nus-scholar.10635-974222023-10-26T09:24:40Z On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence Azimi, S. Ow, Y.S. Breese, M.B.H. PHYSICS 10.1149/1.3481769 Electrochemical and Solid-State Letters 13 11 H382-H384 ESLEF 2014-10-16T09:35:06Z 2014-10-16T09:35:06Z 2010 Article Azimi, S., Ow, Y.S., Breese, M.B.H. (2010). On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence. Electrochemical and Solid-State Letters 13 (11) : H382-H384. ScholarBank@NUS Repository. https://doi.org/10.1149/1.3481769 10990062 http://scholarbank.nus.edu.sg/handle/10635/97422 000283193300029 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1149/1.3481769 |
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PHYSICS |
| author_facet |
PHYSICS Azimi, S. Ow, Y.S. Breese, M.B.H. |
| format |
Article |
| author |
Azimi, S. Ow, Y.S. Breese, M.B.H. |
| spellingShingle |
Azimi, S. Ow, Y.S. Breese, M.B.H. On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence |
| author_sort |
Azimi, S. |
| title |
On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence |
| title_short |
On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence |
| title_full |
On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence |
| title_fullStr |
On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence |
| title_full_unstemmed |
On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence |
| title_sort |
on the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/97422 |
| _version_ |
1781786666926604288 |