On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence
10.1149/1.3481769
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Main Authors: | Azimi, S., Ow, Y.S., Breese, M.B.H. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/97422 |
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Institution: | National University of Singapore |
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