Effects of low-fluence swift iodine ion bombardment on the crystallization of ion-beam-synthesized silicon carbide
Ion beam synthesis using high-fluence carbon ion implantation in silicon in combination with subsequent or in situ thermal annealing has been shown to be able to form nanocrystalline cubic SiC (3C-SiC) layers in silicon. In this study, a silicon carbide layer was synthesized by 40-keV C 12 + implant...
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| Main Authors: | , , , , , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=34247585163&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/61390 |
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| Institution: | Chiang Mai University |