On the dependence of the surface roughness of electrochemically anodized silicon on ion irradiation fluence

10.1149/1.3481769

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Bibliographic Details
Main Authors: Azimi, S., Ow, Y.S., Breese, M.B.H.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97422
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Institution: National University of Singapore