Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters

Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters

10.1016/j.nimb.2007.02.066

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Bibliographic Details
Main Authors: Shao, P.G., van Kan, J.A., Ansari, K., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
PDMS casting
Proton beam writing
Replication
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97564
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2007.02.066

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