Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters

10.1016/j.nimb.2007.02.066

Saved in:
Bibliographic Details
Main Authors: Shao, P.G., van Kan, J.A., Ansari, K., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97564
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-97564
record_format dspace
spelling sg-nus-scholar.10635-975642023-10-25T22:18:13Z Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters Shao, P.G. van Kan, J.A. Ansari, K. Bettiol, A.A. Watt, F. PHYSICS PDMS casting Proton beam writing Replication 10.1016/j.nimb.2007.02.066 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 1 479-482 NIMBE 2014-10-16T09:36:44Z 2014-10-16T09:36:44Z 2007-07 Article Shao, P.G., van Kan, J.A., Ansari, K., Bettiol, A.A., Watt, F. (2007-07). Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 479-482. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.066 0168583X http://scholarbank.nus.edu.sg/handle/10635/97564 000248264900093 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic PDMS casting
Proton beam writing
Replication
spellingShingle PDMS casting
Proton beam writing
Replication
Shao, P.G.
van Kan, J.A.
Ansari, K.
Bettiol, A.A.
Watt, F.
Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters
description 10.1016/j.nimb.2007.02.066
author2 PHYSICS
author_facet PHYSICS
Shao, P.G.
van Kan, J.A.
Ansari, K.
Bettiol, A.A.
Watt, F.
format Article
author Shao, P.G.
van Kan, J.A.
Ansari, K.
Bettiol, A.A.
Watt, F.
author_sort Shao, P.G.
title Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters
title_short Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters
title_full Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters
title_fullStr Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters
title_full_unstemmed Poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters
title_sort poly (dimethyl siloxane) micro/nanostructure replication using proton beam written masters
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/97564
_version_ 1781786695734132736