Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications

Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications

10.1007/s00542-011-1321-z

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Bibliographic Details
Main Authors: Van Kan, J.A., Shao, P.G., Wang, Y.H., Malar, P.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97636
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Institution: National University of Singapore
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Summary:10.1007/s00542-011-1321-z

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