Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications

10.1007/s00542-011-1321-z

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Main Authors:	Van Kan, J.A., Shao, P.G., Wang, Y.H., Malar, P.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97636
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-976362023-10-30T08:19:31Z Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications Van Kan, J.A. Shao, P.G. Wang, Y.H. Malar, P. PHYSICS 10.1007/s00542-011-1321-z Microsystem Technologies 17 9 1519-1527 2014-10-16T09:37:34Z 2014-10-16T09:37:34Z 2011-09 Article Van Kan, J.A., Shao, P.G., Wang, Y.H., Malar, P. (2011-09). Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications. Microsystem Technologies 17 (9) : 1519-1527. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-011-1321-z 09467076 http://scholarbank.nus.edu.sg/handle/10635/97636 000294063300015 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-011-1321-z
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Shao, P.G. Wang, Y.H. Malar, P.
format	Article
author	Van Kan, J.A. Shao, P.G. Wang, Y.H. Malar, P.
spellingShingle	Van Kan, J.A. Shao, P.G. Wang, Y.H. Malar, P. Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
author_sort	Van Kan, J.A.
title	Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
title_short	Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
title_full	Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
title_fullStr	Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
title_full_unstemmed	Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
title_sort	proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97636
_version_	1781786709110816768

Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications

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