Proton beam writing: A tool for high-aspect ratio mask production

10.1007/s00542-006-0192-1

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Main Authors:	Van Kan, J.A., Shao, P.G., Ansari, K., Bettiol, A.A., Osipowicz, T., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97642
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-97642
record_format	dspace
spelling	sg-nus-scholar.10635-976422023-10-30T08:19:36Z Proton beam writing: A tool for high-aspect ratio mask production Van Kan, J.A. Shao, P.G. Ansari, K. Bettiol, A.A. Osipowicz, T. Watt, F. PHYSICS 10.1007/s00542-006-0192-1 Microsystem Technologies 13 5-6 431-434 2014-10-16T09:37:38Z 2014-10-16T09:37:38Z 2007-03 Article Van Kan, J.A., Shao, P.G., Ansari, K., Bettiol, A.A., Osipowicz, T., Watt, F. (2007-03). Proton beam writing: A tool for high-aspect ratio mask production. Microsystem Technologies 13 (5-6) : 431-434. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-006-0192-1 09467076 http://scholarbank.nus.edu.sg/handle/10635/97642 000244690500004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-006-0192-1
author2	PHYSICS
author_facet	PHYSICS Van Kan, J.A. Shao, P.G. Ansari, K. Bettiol, A.A. Osipowicz, T. Watt, F.
format	Article
author	Van Kan, J.A. Shao, P.G. Ansari, K. Bettiol, A.A. Osipowicz, T. Watt, F.
spellingShingle	Van Kan, J.A. Shao, P.G. Ansari, K. Bettiol, A.A. Osipowicz, T. Watt, F. Proton beam writing: A tool for high-aspect ratio mask production
author_sort	Van Kan, J.A.
title	Proton beam writing: A tool for high-aspect ratio mask production
title_short	Proton beam writing: A tool for high-aspect ratio mask production
title_full	Proton beam writing: A tool for high-aspect ratio mask production
title_fullStr	Proton beam writing: A tool for high-aspect ratio mask production
title_full_unstemmed	Proton beam writing: A tool for high-aspect ratio mask production
title_sort	proton beam writing: a tool for high-aspect ratio mask production
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97642
_version_	1781786710790635520

Proton beam writing: A tool for high-aspect ratio mask production

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