Proton beam writing: A tool for high-aspect ratio mask production

Proton beam writing: A tool for high-aspect ratio mask production

10.1007/s00542-006-0192-1

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Bibliographic Details
Main Authors:	Van Kan, J.A., Shao, P.G., Ansari, K., Bettiol, A.A., Osipowicz, T., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97642
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Institution:	National University of Singapore

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