Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment
10.1016/0042-207X(95)00207-3
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2014
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sg-nus-scholar.10635-978722024-11-12T21:16:06Z Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment Huan, C.H.A. Wee, A.T.S. Low, H.S.M. Tan, K.L. PHYSICS 10.1016/0042-207X(95)00207-3 Vacuum 47 2 119-127 VACUA 2014-10-16T09:40:18Z 2014-10-16T09:40:18Z 1996-02 Article Huan, C.H.A., Wee, A.T.S., Low, H.S.M., Tan, K.L. (1996-02). Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment. Vacuum 47 (2) : 119-127. ScholarBank@NUS Repository. https://doi.org/10.1016/0042-207X(95)00207-3 0042207X http://scholarbank.nus.edu.sg/handle/10635/97872 A1996TU56800005 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| description |
10.1016/0042-207X(95)00207-3 |
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PHYSICS |
| author_facet |
PHYSICS Huan, C.H.A. Wee, A.T.S. Low, H.S.M. Tan, K.L. |
| format |
Article |
| author |
Huan, C.H.A. Wee, A.T.S. Low, H.S.M. Tan, K.L. |
| spellingShingle |
Huan, C.H.A. Wee, A.T.S. Low, H.S.M. Tan, K.L. Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment |
| author_sort |
Huan, C.H.A. |
| title |
Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment |
| title_short |
Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment |
| title_full |
Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment |
| title_fullStr |
Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment |
| title_full_unstemmed |
Secondary ion emission from silicon under 8 keV O2 + and Ar+ ion bombardment |
| title_sort |
secondary ion emission from silicon under 8 kev o2 + and ar+ ion bombardment |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/97872 |
| _version_ |
1821186746418724864 |