Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition

Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition

10.1016/S0921-5107(03)00309-X

Saved in:
Bibliographic Details
Main Authors: Wang, Y.H., Lin, J., Huan, C.H.A.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Heterogeneity
Hydrogenated amorphous silicon
Microstructure
PE-CVD
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98052
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-98052
record_format dspace
spelling sg-nus-scholar.10635-980522023-10-27T07:28:22Z Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition Wang, Y.H. Lin, J. Huan, C.H.A. PHYSICS Heterogeneity Hydrogenated amorphous silicon Microstructure PE-CVD 10.1016/S0921-5107(03)00309-X Materials Science and Engineering B: Solid-State Materials for Advanced Technology 104 1-2 80-87 MSBTE 2014-10-16T09:42:26Z 2014-10-16T09:42:26Z 2003-11-15 Article Wang, Y.H., Lin, J., Huan, C.H.A. (2003-11-15). Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 104 (1-2) : 80-87. ScholarBank@NUS Repository. https://doi.org/10.1016/S0921-5107(03)00309-X 09215107 http://scholarbank.nus.edu.sg/handle/10635/98052 000186104400016 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Heterogeneity
Hydrogenated amorphous silicon
Microstructure
PE-CVD
spellingShingle Heterogeneity
Hydrogenated amorphous silicon
Microstructure
PE-CVD
Wang, Y.H.
Lin, J.
Huan, C.H.A.
Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition
description 10.1016/S0921-5107(03)00309-X
author2 PHYSICS
author_facet PHYSICS
Wang, Y.H.
Lin, J.
Huan, C.H.A.
format Article
author Wang, Y.H.
Lin, J.
Huan, C.H.A.
author_sort Wang, Y.H.
title Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition
title_short Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition
title_full Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition
title_fullStr Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition
title_full_unstemmed Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition
title_sort structural and optical properties of a-si:h/nc-si:h thin films grown from ar-h2-sih4 mixture by plasma-enhanced chemical vapor deposition
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98052
_version_ 1781786797924155392

Similar Items