Structural and optical properties of a-Si:H/nc-Si:H thin films grown from Ar-H2-SiH4 mixture by plasma-enhanced chemical vapor deposition

10.1016/S0921-5107(03)00309-X

Saved in:

Bibliographic Details
Main Authors:	Wang, Y.H., Lin, J., Huan, C.H.A.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Heterogeneity Hydrogenated amorphous silicon Microstructure PE-CVD
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98052
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Be the first to leave a comment!

Similar Items