Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy
Applied Spectroscopy
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sg-nus-scholar.10635-983542015-02-20T07:30:51Z Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy Wang, C.Y. Shen, Z.X. Zheng, J.Z. PHYSICS Applied Spectroscopy 54 2 209-213 APSPA 2014-10-16T09:46:06Z 2014-10-16T09:46:06Z 2000-02 Article Wang, C.Y.,Shen, Z.X.,Zheng, J.Z. (2000-02). Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy. Applied Spectroscopy 54 (2) : 209-213. ScholarBank@NUS Repository. 00037028 http://scholarbank.nus.edu.sg/handle/10635/98354 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Applied Spectroscopy |
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PHYSICS |
| author_facet |
PHYSICS Wang, C.Y. Shen, Z.X. Zheng, J.Z. |
| format |
Article |
| author |
Wang, C.Y. Shen, Z.X. Zheng, J.Z. |
| spellingShingle |
Wang, C.Y. Shen, Z.X. Zheng, J.Z. Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy |
| author_sort |
Wang, C.Y. |
| title |
Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy |
| title_short |
Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy |
| title_full |
Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy |
| title_fullStr |
Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy |
| title_full_unstemmed |
Thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by FT-IR spectroscopy |
| title_sort |
thermal cure study of a low-k methyl silsesquioxane for intermetal dielectric application by ft-ir spectroscopy |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98354 |
| _version_ |
1681092008659124224 |