Characterization of a low-k organic spin-on-glass as an intermetal dielectric

Characterization of a low-k organic spin-on-glass as an intermetal dielectric

10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M

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Bibliographic Details
Main Authors: Wang, C.Y., Zheng, J.Z., Shen, Z.X., Xu, Y., Lim, S.L., Liu, R., Huan, A.C.H.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/95955
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/95955

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