Characterization of a low-k organic spin-on-glass as an intermetal dielectric

10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M

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Bibliographic Details
Main Authors:	Wang, C.Y., Zheng, J.Z., Shen, Z.X., Xu, Y., Lim, S.L., Liu, R., Huan, A.C.H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/95955
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Institution:	National University of Singapore

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