Characterization of a low-k organic spin-on-glass as an intermetal dielectric
10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M
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sg-nus-scholar.10635-959552015-01-16T11:55:58Z Characterization of a low-k organic spin-on-glass as an intermetal dielectric Wang, C.Y. Zheng, J.Z. Shen, Z.X. Xu, Y. Lim, S.L. Liu, R. Huan, A.C.H. PHYSICS 10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M Surface and Interface Analysis 28 1 97-100 SIAND 2014-10-16T09:17:47Z 2014-10-16T09:17:47Z 1999 Article Wang, C.Y.,Zheng, J.Z.,Shen, Z.X.,Xu, Y.,Lim, S.L.,Liu, R.,Huan, A.C.H. (1999). Characterization of a low-k organic spin-on-glass as an intermetal dielectric. Surface and Interface Analysis 28 (1) : 97-100. ScholarBank@NUS Repository. <a href="https://doi.org/10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M" target="_blank">https://doi.org/10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M</a> 01422421 http://scholarbank.nus.edu.sg/handle/10635/95955 NOT_IN_WOS Scopus |
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10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M |
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PHYSICS Wang, C.Y. Zheng, J.Z. Shen, Z.X. Xu, Y. Lim, S.L. Liu, R. Huan, A.C.H. |
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Article |
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Wang, C.Y. Zheng, J.Z. Shen, Z.X. Xu, Y. Lim, S.L. Liu, R. Huan, A.C.H. |
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Wang, C.Y. Zheng, J.Z. Shen, Z.X. Xu, Y. Lim, S.L. Liu, R. Huan, A.C.H. Characterization of a low-k organic spin-on-glass as an intermetal dielectric |
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Wang, C.Y. |
title |
Characterization of a low-k organic spin-on-glass as an intermetal dielectric |
title_short |
Characterization of a low-k organic spin-on-glass as an intermetal dielectric |
title_full |
Characterization of a low-k organic spin-on-glass as an intermetal dielectric |
title_fullStr |
Characterization of a low-k organic spin-on-glass as an intermetal dielectric |
title_full_unstemmed |
Characterization of a low-k organic spin-on-glass as an intermetal dielectric |
title_sort |
characterization of a low-k organic spin-on-glass as an intermetal dielectric |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/95955 |
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1681091571952386048 |