Characterization of a low-k organic spin-on-glass as an intermetal dielectric

10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M

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Main Authors:	Wang, C.Y., Zheng, J.Z., Shen, Z.X., Xu, Y., Lim, S.L., Liu, R., Huan, A.C.H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/95955
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-95955
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spelling	sg-nus-scholar.10635-959552015-01-16T11:55:58Z Characterization of a low-k organic spin-on-glass as an intermetal dielectric Wang, C.Y. Zheng, J.Z. Shen, Z.X. Xu, Y. Lim, S.L. Liu, R. Huan, A.C.H. PHYSICS 10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M Surface and Interface Analysis 28 1 97-100 SIAND 2014-10-16T09:17:47Z 2014-10-16T09:17:47Z 1999 Article Wang, C.Y.,Zheng, J.Z.,Shen, Z.X.,Xu, Y.,Lim, S.L.,Liu, R.,Huan, A.C.H. (1999). Characterization of a low-k organic spin-on-glass as an intermetal dielectric. Surface and Interface Analysis 28 (1) : 97-100. ScholarBank@NUS Repository. <a href="https://doi.org/10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M" target="_blank">https://doi.org/10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M</a> 01422421 http://scholarbank.nus.edu.sg/handle/10635/95955 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1002/(SICI)1096-9918(199908)28:13.0.CO;2-M
author2	PHYSICS
author_facet	PHYSICS Wang, C.Y. Zheng, J.Z. Shen, Z.X. Xu, Y. Lim, S.L. Liu, R. Huan, A.C.H.
format	Article
author	Wang, C.Y. Zheng, J.Z. Shen, Z.X. Xu, Y. Lim, S.L. Liu, R. Huan, A.C.H.
spellingShingle	Wang, C.Y. Zheng, J.Z. Shen, Z.X. Xu, Y. Lim, S.L. Liu, R. Huan, A.C.H. Characterization of a low-k organic spin-on-glass as an intermetal dielectric
author_sort	Wang, C.Y.
title	Characterization of a low-k organic spin-on-glass as an intermetal dielectric
title_short	Characterization of a low-k organic spin-on-glass as an intermetal dielectric
title_full	Characterization of a low-k organic spin-on-glass as an intermetal dielectric
title_fullStr	Characterization of a low-k organic spin-on-glass as an intermetal dielectric
title_full_unstemmed	Characterization of a low-k organic spin-on-glass as an intermetal dielectric
title_sort	characterization of a low-k organic spin-on-glass as an intermetal dielectric
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/95955
_version_	1681091571952386048

Characterization of a low-k organic spin-on-glass as an intermetal dielectric

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