Three-dimensional microfabrication in bulk silicon using high-energy protons
10.1063/1.1723703
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sg-nus-scholar.10635-983982023-10-29T20:43:09Z Three-dimensional microfabrication in bulk silicon using high-energy protons Teo, E.J. Breese, M.B.H. Tavernier, E.P. Bettiol, A.A. Watt, F. Liu, M.H. Blackwood, D.J. MATERIALS SCIENCE PHYSICS 10.1063/1.1723703 Applied Physics Letters 84 16 3202-3204 APPLA 2014-10-16T09:46:38Z 2014-10-16T09:46:38Z 2004-04-19 Article Teo, E.J., Breese, M.B.H., Tavernier, E.P., Bettiol, A.A., Watt, F., Liu, M.H., Blackwood, D.J. (2004-04-19). Three-dimensional microfabrication in bulk silicon using high-energy protons. Applied Physics Letters 84 (16) : 3202-3204. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1723703 00036951 http://scholarbank.nus.edu.sg/handle/10635/98398 000220975800078 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1063/1.1723703 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Teo, E.J. Breese, M.B.H. Tavernier, E.P. Bettiol, A.A. Watt, F. Liu, M.H. Blackwood, D.J. |
| format |
Article |
| author |
Teo, E.J. Breese, M.B.H. Tavernier, E.P. Bettiol, A.A. Watt, F. Liu, M.H. Blackwood, D.J. |
| spellingShingle |
Teo, E.J. Breese, M.B.H. Tavernier, E.P. Bettiol, A.A. Watt, F. Liu, M.H. Blackwood, D.J. Three-dimensional microfabrication in bulk silicon using high-energy protons |
| author_sort |
Teo, E.J. |
| title |
Three-dimensional microfabrication in bulk silicon using high-energy protons |
| title_short |
Three-dimensional microfabrication in bulk silicon using high-energy protons |
| title_full |
Three-dimensional microfabrication in bulk silicon using high-energy protons |
| title_fullStr |
Three-dimensional microfabrication in bulk silicon using high-energy protons |
| title_full_unstemmed |
Three-dimensional microfabrication in bulk silicon using high-energy protons |
| title_sort |
three-dimensional microfabrication in bulk silicon using high-energy protons |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98398 |
| _version_ |
1781786864671260672 |