Three-dimensional microfabrication in bulk silicon using high-energy protons

Three-dimensional microfabrication in bulk silicon using high-energy protons

10.1063/1.1723703

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Bibliographic Details
Main Authors:	Teo, E.J., Breese, M.B.H., Tavernier, E.P., Bettiol, A.A., Watt, F., Liu, M.H., Blackwood, D.J.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98398
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Institution:	National University of Singapore

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