Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists

10.1016/j.nimb.2011.02.027

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Main Authors:	Ynsa, M.D., Shao, P., Kulkarni, S.R., Liu, N.N., Van Kan, J.A.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98701
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-987012024-11-13T07:44:43Z Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists Ynsa, M.D. Shao, P. Kulkarni, S.R. Liu, N.N. Van Kan, J.A. PHYSICS 10.1016/j.nimb.2011.02.027 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 20 2409-2412 NIMBE 2014-10-16T09:50:22Z 2014-10-16T09:50:22Z 2011-10-15 Conference Paper Ynsa, M.D., Shao, P., Kulkarni, S.R., Liu, N.N., Van Kan, J.A. (2011-10-15). Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 269 (20) : 2409-2412. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2011.02.027 0168583X http://scholarbank.nus.edu.sg/handle/10635/98701 000296544900051 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/j.nimb.2011.02.027
author2	PHYSICS
author_facet	PHYSICS Ynsa, M.D. Shao, P. Kulkarni, S.R. Liu, N.N. Van Kan, J.A.
format	Conference or Workshop Item
author	Ynsa, M.D. Shao, P. Kulkarni, S.R. Liu, N.N. Van Kan, J.A.
spellingShingle	Ynsa, M.D. Shao, P. Kulkarni, S.R. Liu, N.N. Van Kan, J.A. Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists
author_sort	Ynsa, M.D.
title	Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists
title_short	Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists
title_full	Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists
title_fullStr	Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists
title_full_unstemmed	Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists
title_sort	exposure parameters in proton beam writing for kmpr and epo core negative tone photoresists
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98701
_version_	1821225681821892608

Exposure parameters in proton beam writing for KMPR and EPO Core negative tone photoresists

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