Fabrication of micro-optical components in polymer using proton beam writing

Fabrication of micro-optical components in polymer using proton beam writing

10.1117/12.524300

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Bibliographic Details
Main Authors: Bettiol, A.A., Ansari, K., Sum, T.C., Van Kan, J.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Gratings
Microlens array
PMMA
Polymer
Proton beam writing
SU-8
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98706
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Institution: National University of Singapore
id sg-nus-scholar.10635-98706
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spelling sg-nus-scholar.10635-987062023-10-30T22:46:58Z Fabrication of micro-optical components in polymer using proton beam writing Bettiol, A.A. Ansari, K. Sum, T.C. Van Kan, J.A. Watt, F. PHYSICS Gratings Microlens array PMMA Polymer Proton beam writing SU-8 10.1117/12.524300 Proceedings of SPIE - The International Society for Optical Engineering 5347 255-263 PSISD 2014-10-16T09:50:25Z 2014-10-16T09:50:25Z 2004 Conference Paper Bettiol, A.A., Ansari, K., Sum, T.C., Van Kan, J.A., Watt, F. (2004). Fabrication of micro-optical components in polymer using proton beam writing. Proceedings of SPIE - The International Society for Optical Engineering 5347 : 255-263. ScholarBank@NUS Repository. https://doi.org/10.1117/12.524300 0277786X http://scholarbank.nus.edu.sg/handle/10635/98706 000189447300029 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Gratings
Microlens array
PMMA
Polymer
Proton beam writing
SU-8
spellingShingle Gratings
Microlens array
PMMA
Polymer
Proton beam writing
SU-8
Bettiol, A.A.
Ansari, K.
Sum, T.C.
Van Kan, J.A.
Watt, F.
Fabrication of micro-optical components in polymer using proton beam writing
description 10.1117/12.524300
author2 PHYSICS
author_facet PHYSICS
Bettiol, A.A.
Ansari, K.
Sum, T.C.
Van Kan, J.A.
Watt, F.
format Conference or Workshop Item
author Bettiol, A.A.
Ansari, K.
Sum, T.C.
Van Kan, J.A.
Watt, F.
author_sort Bettiol, A.A.
title Fabrication of micro-optical components in polymer using proton beam writing
title_short Fabrication of micro-optical components in polymer using proton beam writing
title_full Fabrication of micro-optical components in polymer using proton beam writing
title_fullStr Fabrication of micro-optical components in polymer using proton beam writing
title_full_unstemmed Fabrication of micro-optical components in polymer using proton beam writing
title_sort fabrication of micro-optical components in polymer using proton beam writing
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98706
_version_ 1781786933930754048

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